Metrology platform for Life Sciences & Biotech and Semiconductor industry
RM-5 is an integrated platform both for non-destructive characterization in life sciences and biotech and for high-precision wafer-level characterization and processing of hybrid optical–electronic chips.
The system combines advanced nano-scale surface metrology and conditioning with stable, thermally controlled wafer handling.
Our instrument features sub-micron optical–electronic alignment, repeatable wafer-level testing, scalable manufacturing workflows.
Empowering the Life Sciences & Biotech
Wafer-scale Metrology Platform – RM-5
The RM-5 is a high-precision wafer-scale metrology platform designed for advanced process control, advanced semiconductor research and cross-tool process validation. The system integrates a vibration-isolated chamber architecture with fiber-coupled spectroscopy covering 390–1100 nm and angular measurement capability down to 0.04°, enabling highly sensitive optical characterization of wafer-level structures.
A precision wafer chuck provides sub-200 nm positioning accuracy, while configurable excitation sources—including three single-wavelength lasers or tunable UV/visible lasers—support flexible experimental configurations. Controlled via RM-Soft with Linux/Windows compatibility and remote operation, the RM-5 delivers a stable and versatile platform for next-generation wafer-scale optical metrology.
Key functionalities
RM-5
nm-resolution
- Surface Scanning Spectroscopy
- Photo-Luminescence
- Angle-Resolved PL Spectroscopy
- M-line Spectroscopy
- Elastic & Inelastic scattering of Light / Brillouin- and
- Raman Scattering
Upgrade to RM-7 to include
- Spectroscopic Ellipsometry
- Transmission Spectroscopy
Upgrade to RM-7 to include
- Spectroscopic Ellipsometry
- Transmission Spectroscopy
Measurements performed
@ Room temperature
@ Optional: Temperatures from 220°K to 370°K / -50°C to 100°C (wafers)
@ Atmospheric conditions
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